Gases with Ultra high purity are generally used as protective and carrier gases in the manufacturing of integrated circuits, semiconductors, and electronic vacuum devices,during chemical vapor deposition, and for liquid diffusion sources, and as protective gases for devices in high-temperature diffusion furnaces.

Ultra high purity nitrogen is used as a gas for displacement, drying, storage, and transportation in processes such as epitaxy, photolithography, cleaning, and evaporation. In the manufacturing of picture tubes, nitrogen purity is required to be above 99.99%. In aerospace technology, the liquid hydrogen refueling system must first be replaced with nitrogen, and then replaced with ultra-high purity nitrogen.
For ultrapure gases, any small pollution can seriously affect the quality of the gas, so cleanliness and high sealing during gas storage and transportation are particularly important. Ultra pure gases are mainly stored and transported in high-pressure steel cylinders or low-temperature liquefied gas containers.

High pressure steel cylinders are solid and durable, flexible in transportation and use, and have no gas loss, but their gas purity and stability are poor; Low temperature liquefied gas containers have a large storage capacity per unit volume, but there are gas emission losses.

The storage of ultra-high purity nitrogen gas is a meticulous and rigorous task that requires multiple considerations, from selecting suitable storage containers to strictly monitoring all aspects of the storage process, to comprehensively ensure the purity and quality of nitrogen gas, thereby ensuring its widespread application in the manufacturing fields of integrated circuits, semiconductors, and vacuum devices.

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